Beschreibung
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
Autorenporträt
Seán Thomas Barry, Carleton University, Ottawa, Canada.
Herstellerkennzeichnung:
Walter de Gruyter GmbH
De Gruyter GmbH
Genthiner Strasse 13
10785 Berlin
DE
E-Mail: productsafety@degruyterbrill.com
