Chemical Vapor Deposition Polymerization

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The Growth and Properties of Parylene Thin Films

ISBN:	1441954139
ISBN 13:	9781441954138
Autor:	Fortin, Jeffrey B/Toh-Ming Lu
Verlag:	Springer Verlag GmbH
Umfang:	xvii, 102 S.
Erscheinungsdatum:	03.12.2010
Auflage:	1/2004
Produktform:	Kartoniert
Einband:	KT

Artikelnummer: 951352 Kategorie: Theoretische Physik

Beschreibung

Beschreibung

Inhaltsangabe1. Introduction.- 2. Deposition Equipment.- 3. Step-by-Step Guide to Depositing Parylene.- 4. Parylene-N Precursor Chemistry.- 5. Deposition Kinetics for Polymerization via the Gorham Route.- 6. Film Properties.- 7. Other CVD Polymers.- References.

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Chemical Vapor Deposition Polymerization

The Growth and Properties of Parylene Thin Films

Beschreibung

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