Thin Film Transistors 1 & 2

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Materials and Processes, Amorphous Silicon Thin Film Transistors/Polycrystalline Silicon Thin Transistors

ISBN: 1402075049
ISBN 13: 9781402075049
Herausgeber: Yue Kuo
Verlag: Springer Verlag GmbH
Umfang: xxvi, 1016 S.
Erscheinungsdatum: 31.12.2003
Auflage: 1/2003
Produktform: Mehrteiliges Produkt
Einband: GEB

Written by leading researchers who have extensive experience with reputed track recordsProvides practical information on preparing individual functional a-Si:H TFTs and poly-Si TFTs as well as large-area TFT arrays

Artikelnummer: 1564956 Kategorie:

Beschreibung

References. 170 List of Symbols. 176 CHAPTER 4 a-Si:H TFT Structures. 183 YueKuo 1. Introduction. 183 2. Basic Structures. 183 3. Simplified Structures and Processes. 188 4. Unique Structures and Processes. 192 5. Redundant Structures. 195 6. Summary. 198 References. 200 List of Symbols. 202 CHAPTER 5 Deposition of Intrinsic and Doped Semiconductor Thin Films for a-Si:H TFT. 203 YueKuo 1. Introduction. 203 2. Semiconductor Layer Deposition. 206 3. Doped Amorphous and Microcrystalline Silicon. 223 4. Summary. 231 References. 233 List of Symbols. 239 CHAPTER 6 Deposition of Dielectric Thin Films for a-Si:H TFT. 241 YueKuo 1. Introduction. 241 2. Selection of Dielectric Materials and Deposition Methods. 242 3. PECVD SiNx Dielectric Layer. 244 4. Yield Issues Related to Dielectrics. 263 5. Summary. 265 References.

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