Technology of Integrated Circuits

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Springer Series in Advanced Microelectronics 2

ISBN: 3540661999
ISBN 13: 9783540661993
Autor: Widmann, D/Mader, H/Friedrich, H
Verlag: Springer Verlag GmbH
Umfang: xviii, 342 S., 300 s/w Illustr.
Erscheinungsdatum: 06.07.2000
Auflage: 1/2000
Produktform: Gebunden/Hardback
Einband: GEB

Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials, modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.

Artikelnummer: 1566769 Kategorie:

Beschreibung

Inhaltsangabe1 Introduction.- 2 Basic principles of integrated circuits technology.- 3 Film technology.- 4 Lithography.- 5 Etching technology.- 6 Doping technology.- 7 Cleaning technology.- 8 Process integration.- References.

Inhaltsverzeichnis

Introduction.- Basic Principles of Integrated Circuit Technology.- Film Technology.- Lithography.- Etching Technology.- Doping Technology.- Cleaning Technology.- Process Integration.

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