Nanofabrication

Lieferzeit: Lieferbar innerhalb 14 Tagen

149,79 

Principles, Capabilities and Limits

ISBN: 3319818759
ISBN 13: 9783319818757
Autor: Cui, Zheng
Verlag: Springer Verlag GmbH
Umfang: xvii, 432 S., 266 s/w Illustr., 50 farbige Illustr., 432 p. 316 illus., 50 illus. in color.
Erscheinungsdatum: 20.06.2018
Auflage: 2/2018
Produktform: Kartoniert
Einband: Kartoniert

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

Artikelnummer: 5459425 Kategorie:

Beschreibung

Autorenporträt

Zheng Cui, PhD, is a professor at and Director of the Department of Printed Electronics at the Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Sciences. He received his PhD from Southeast University in Nanjing, China, and has been a Visiting Fellow at the Microelectronics Research Center at Cambridge University, as well as a Senior Scientist and Principal Scientist at Central Microstructure Facility in Rutherford Appleton Laboratory.

Herstellerkennzeichnung:


Springer Verlag GmbH
Tiergartenstr. 17
69121 Heidelberg
DE

E-Mail: juergen.hartmann@springer.com

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