Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

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ISBN: 3662488140
ISBN 13: 9783662488140
Autor: Zhang, Xiao-Sheng
Verlag: Springer Verlag GmbH
Umfang: xx, 122 S., 19 s/w Illustr., 76 farbige Illustr., 122 p. 95 illus., 76 illus. in color.
Erscheinungsdatum: 08.12.2015
Auflage: 1/2016
Produktform: Gebunden/Hardback
Einband: Gebunden

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

Artikelnummer: 8696352 Kategorie:

Beschreibung

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

Autorenporträt

Dr. Zhang Xiao-Sheng is currently working as a postdoctoral researcher at École Polytechnique Fédérale de Lausanne (EPFL), Switzerland, and as a visiting researcher at the University of Tokyo. His research interests mainly include three areas: (1) micro/nano integrated fabrication technology; (2) micro/nano energy technology; (3) smart drug delivery system. HONORS & AWARDS 2014 Excellent Doctoral Dissertation of Peking University 2014 Outstanding Graduation Student of Peking University 2014 Outstanding Graduation Student of Beijing City 2013 National Scholarship for Outstanding Graduate Students 2013 Academic Top 10 Graduate Student, Peking University 2013 Innovation Award, Peking University 2013 Academic Top 10 Graduate Student, School of Electronics Engineering and Computer Science, Peking University 2013 Best Paper Award, The 11th Annual National Academic Conference for Ph.D. Candidates 2012 Lu Jiaxi Outstanding Graduate Student Award, Lu Jiaxi Education Foundation (award 20 students nationwide each year) 2012 Tokyo Electron Limited (TEL) Scholarship, Peking University 2012 Founder Scholarship, Peking University 2011 Merit Student Award, Peking University 2011 Best Poster Award, 4th Intl. Conf. on Nanosci. & Tech. (ChinaNano2011), Beijing 2011 Best Group Award, Platinum Level, 4th Asia Nanotech Camp 2011 (ANC2011), Korea 2011 Best Poster Award, Silver Level, 4th Asia Nanotech Camp 2011 (ANC2011), Korea 2011 Best Oral Presentation, 2011 Beijing Microelectronics Forum for Ph.D. Students 2010 Outstanding Graduate Student Leader Award, University of Electronic Science and Technology of China 20032007 Outstanding Student Scholarship for three consecutive years & Outstanding Student Leader Award, University of Electronic Science and Technology of China JOURNAL PUBLICATIONS 1. XiaoSheng Zhang, M. D. Han, R. X. Wang, F. Y. Zhu, Z. H. Li, W. Wang, H. X. Zhang. Frequencymultiplication highoutput triboelectric nanogenerator for sustainably powering biomedical microsystems. Nano Letters, 2013, 13, 11681172. 2. XiaoSheng Zhang, F. Y. Zhu, M. D. Han, X. M. Sun, X. H. Peng, H. X. Zhang. Selfcleaning poly(dimethylsiloxane) film with functional micro/nano hierarchical structures. Langmuir, 2013, 29, 1076910775. 3. XiaoSheng Zhang, M. D. Han, B. Meng, H. X. Zhang. High Performance Triboelectric Nanogenerators Based on LargeScale MassProduction Fabrication Technologies. Nano Energy, 2015, 11, 304322.(Review Article) 4. XiaoSheng Zhang, M. D. Han, R. X. Wang, B. Meng, F. Y. Zhu, X. M. Sun, W. Hu, W. Wang, Z. H. Li, H. X. Zhang. HighPerformance Triboelectric Nanogenerator with Enhanced Energy Density Based on SingleStep Fluorocarbon Plasma Treatment. Nano Energy, 2014, 4, 123131. 5. H. Zhang*, Xiao-Sheng Zhang*, X. Cheng*, Y. Liu, M. Han, X. Xue, S. Wang, F. Yang, A.S. Smitha, H. Zhang, Z. Xu. A flexible and implantable piezoelectric generator harvesting energy from the pulsation of ascending aorta: In vitro and in vivo studies. Nano Energy, 2015, 12, 296-304. (*Co-First Author) 6. M.D. Han*, Xiao-Sheng Zhang*, B. Meng, W. Liu, W. Tang, X. M. Sun, H. X. Zhang. r-Shaped hybrid nanogenerator with enhanced piezoelectricity. ACS Nano, 2013, 7, 8554-8560. (*Co-First Author) 7. Nicolas J. Peter*, Xiao-Sheng Zhang*, S. G. Chu, F. Y. Zhu, H. Seidel, H. X. Zhang. Tunable wetting behavior of nanostructured poly(dimethylsiloxane) by plasma combination treatments. Applied Physics Letters, 2012, 101, 221601. (*Co-First Author) 8. XiaoSheng Zhang, B. Meng, F.Y. Zhu, W. Tang, H.X. Zhang. Switchable Wetting & Flexible SiC Thin Film with Nanostructures for Microfluidic SurfaceEnhanced Raman Scattering Sensors. Sensors and Actuators A: Physical, 2014, 208, 166173. 9. XiaoSheng Zhang, Z.M. Su, M.D. Han, B. Meng, F.Y. Zhu, H.X. Zhang. Fabrication and characterization of the functional paryleneC film with micro/nano hierarchical structures.

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