Beschreibung
Aluminium Nitride based Sensor details the design, simulation and fabrication of AlN based MEMS acoustic sensor for high sound pressure level measurement that is beneficial to researchers as well as to students seeking to better understand the sensor fabrication and become more efficient and productive in sensor technology. This book details the comparison between different piezoelectric materials properties. It covers the major features of the semiconductor fabrication steps with both practical and theoretical aspects, which should appeal to readers with variety of interests and needs. The author, shares valuable knowledge and experience on acoustic sensor design, simulation and fabrication. Specific topics covered include design and mathematical modelling, mask layout, bulk micromachining and diaphragm optimization, mask design, development and optimization of AlN layer.
Autorenporträt
Vipul Vaibhav Mishra, M.Tech: Studied Electronics Design and Technology at Tezpur University. He has research experience in MEMS & Micro Sensor group at CSIR-CEERI, Pilani also he worked as Asst. Professor at MNIT Jaipur, ITM University Gwalior and IET Lucknow. His area of interest is MEMS,Semiconductor devices Nanotechnology and material science
Herstellerkennzeichnung:
OmniScriptum SRL
Str. Armeneasca 28/1, office 1
2012 Chisinau
MD
E-Mail: info@omniscriptum.com
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